The Sensirion liquid flow sensor provides outstanding performance and speed in measuring liquid flow in a planar microfluidic glass substrate with down-mount fluidic ports for a highly compact integration into any fluidic manifold system. It is thus ideal for high-volume applications with strict space limitations. Unique CMOSens planar packaging technology enables non-invasive measurement of liquid flow inside a cost-effective planar form factor. The flow channel passes through the planar substrate and is connected to fluidic channels via a manifold. The fluid is only in contact with the glass channel. The digital micro sensor chip provides the full signal processing functionality for a fully calibrated, temperature compensated digital output. This flow sensor is completely calibrated and has excellent media compatibility and chemical resistance.

Ultra small size
Excellent repeatability
Response time 30 ms
Bio-compatible & inert materials
Maximum flow rates for water-based fluids is 1 ml/min
Incredibly small footprint of 10 x 10 mm2
Calibrated and temperature compensated digital output
Media isolated sensing principle hence no direct sensor contact with the fluid